Evaporation Source Series: RCL 3 kW Multiple Crucible Linear e-Gun™
Thermionics研究能力系列，3 kW多坩堝線(xiàn)性電子槍，提供增強(qiáng)的光束穩(wěn)定性和高效的XY掃描，具有完整的坩堝覆蓋范圍，并可通過(guò)自動(dòng)分度器進(jìn)行自動(dòng)定位，單獨(dú)出售。
特性
真正的XY掃掠，完全覆蓋坩堝
掃頻線(xiàn)圈隨電源一起提供
增強(qiáng)光束準(zhǔn)直
插入式發(fā)射器模塊
增強(qiáng)的高穩(wěn)定性冷卻
交叉污染屏蔽
堅(jiān)固的設(shè)計(jì)
可選自動(dòng)索引器
Specifications
| Operating Pressure | Below 5 x 10-5?Torr is desirable for best operation |
| Beam Voltage | 4,000 VDC |
| Beam Current | 0–750 mA continuously variable |
| Maximum Power | 3 kW |
| Cooling Water | 1.5 gpm |
| Pressure Differential | 25 psi minimum |
| Maximum Bakeout Temperature | 230°C (446°F) |
| Crucible Volume | 2.24 cc x 3, 4 or 5 crucibles |
Ordering Information
| Description | Model No. |
|---|---|
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 3-position | RCL0303 |
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 4-position | RCL0304 |
| Multiple crucible 3 kW e-Gun source with sweep coils, linear 5-position | RCL0305 |
