Thermionics HCL e-Gun™ Motorized Z Series Crucible Pocket Indexing Evaporation Source HCL系列多坩堝蒸發(fā)源
Features
- Simple control characteristics
- Reliability is high and stable
- Range of speed control (motorized versions)
- Long motor life
- Computer PC controlled
- Smaller actuator profile allows for additional source flange utilities
- Scale for visual crucible position
特征
簡單的控制特性
可靠性高且穩(wěn)定
速度控制范圍（電動版）
電機(jī)壽命長
計算機(jī)PC控制
較小的致動器輪廓允許額外的源法蘭公用設(shè)施
坩堝視覺位置刻度
Specifications?
| Operating Pressure | Below 5×10-5?Torr is desirable for best operation |
| Power Rating | 6.10 or 15 kW |
| Filament | 12 VAC 60A |
| Maximum Power | 15 kW |
| Cooling Water | 2gpm |
| Pressure Differential | 25 psi minimum |
| Max. Bakeout Temp. | 200° C |
| Crucible Volume | 7, 10, 15, 25, 40 or 75 cc |
Motor Stepper
| Description | Model No. |
| 7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets | HCL-0607-X-ZST-MS |
| 10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1010-X-ZST-MS |
| 15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1015-X-ZST-MS |
| 25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1025-X-ZST-MS |
| 40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1040-X-ZST-MS |
| 75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets | HCL-1575-X-ZST-MS |
Manual
| Description | Model No. |
| 7 cc HCL series e-Gun, 6 kW, 3, 4, 5, or 6+ pockets | HCL-0607-X-ZST-M |
| 10 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1010-X-ZST-M |
| 15 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1015-X-ZST-M |
| 25 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1025-X-ZST-M |
| 40 cc HCL series e-Gun, 10 kW, 3, 4, 5, or 6+ pockets | HCL-1040-X-ZST-M |
| 75 cc HCL series e-Gun, 15 kW, 3, 4, 5, or 6+ pockets | HCL-1575-X-ZST-M |
