Newmark RMS-5防水旋轉(zhuǎn)臺

RMS-5采用完全密封設(shè)計,與外部環(huán)境徹底隔離,特別適用于半導(dǎo)體晶圓切割等應(yīng)用場景。

該轉(zhuǎn)臺具備IP68防護(hù)等級,可完全浸沒于水中運行,同時也能滿足戶外防塵防潮的應(yīng)用需求。其工作臺運動采用單套預(yù)緊交叉滾子軸承設(shè)計,摒棄了傳統(tǒng)雙軸承配置,從而顯著提升了軸向跳動精度和穩(wěn)定性。

這款防水旋轉(zhuǎn)臺采用蝸輪驅(qū)動系統(tǒng),提供72:1和36:1兩種減速比選項,并通過預(yù)緊蝸桿有效降低傳動鏈背隙。標(biāo)準(zhǔn)配置包含集成式光學(xué)原點開關(guān)、23步進(jìn)電機以及10英尺長的電機/信號復(fù)合電纜。用戶可選配步進(jìn)電機旋轉(zhuǎn)編碼器,若需高速應(yīng)用還可升級為23無刷伺服電機版本。

Specifications
Resolution
up to 0.36 arc-sec (depends on gear ratio and motor type)
Accuracy
70 arc-sec
Max. Speed
Stepper Motor: 25°/sec (72:1 gear ratio), 50°/sec (36:1 gear ratio) Servo Motor: 125°/sec (72:1 gear ratio), 250°/sec (36:1 gear ratio)
Unidirectional Repeatability
5 arc-sec
Bi-directional Repeatability
45 arc-sec
Max. Output Torque
10.2 Nm (90 lb-in)
Max Load Capacity
36.3 kg (80 lbs)
Travel Range
360° Continuous
Encoder
Optical rotary encoder mounted to rear of motor, 4000 CPR with Index (Optional)
Limit Switches
None
Origin
Optical home switch Optical index mark on encoder (with encoder option)
Gear Ratio
72:1 or 36:1
Stage Weight
5 kg (11 lbs)
Material
Aluminum Alloy Construction
Finish
Black Anodize

RMS-5 Submersible Rotary Stage