{"id":232,"date":"2025-03-21T14:23:43","date_gmt":"2025-03-21T06:23:43","guid":{"rendered":"https:\/\/www.bihec.com\/waferpro-wafers\/?p=232"},"modified":"2025-03-21T14:23:43","modified_gmt":"2025-03-21T06:23:43","slug":"waferpro%e7%bb%9d%e7%bc%98%e4%bd%93%e4%b8%8a%e7%a1%85-soi-%e6%99%b6%e5%9c%86waferpro%e8%bf%9b%e5%8f%a3%e4%bb%a3%e7%90%86","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/waferpro-wafers\/waferpro%e7%bb%9d%e7%bc%98%e4%bd%93%e4%b8%8a%e7%a1%85-soi-%e6%99%b6%e5%9c%86waferpro%e8%bf%9b%e5%8f%a3%e4%bb%a3%e7%90%86\/","title":{"rendered":"WaferPro,\u7edd\u7f18\u4f53\u4e0a\u7845 (SOI) \u6676\u5706,WaferPro\u8fdb\u53e3\u4ee3\u7406"},"content":{"rendered":"
WaferPro<\/a>,\u7edd\u7f18\u4f53\u4e0a\u7845 (SOI) \u6676\u5706<\/a>,WaferPro\u8fdb\u53e3\u4ee3\u7406<\/a>,WaferPro<\/strong>\u00a0\u73b0\u63d0\u4f9b\u9ad8\u8d28\u91cf\u7684\u7edd\u7f18\u4f53\u4e0a\u7845\uff08SOI\uff09\u6676\u5706\uff0c\u8fdb\u4e00\u6b65\u6269\u5c55\u4e86\u6211\u4eec\u5168\u9762\u7684\u7845\u6676\u5706\u4ea7\u54c1\u7ebf\u3002\u6211\u4eec\u9876\u7ea7\u7684 SOI \u6676\u5706\u9488\u5bf9\u4ece\u4f20\u611f\u5668\u5230\u529f\u7387\u7ec4\u4ef6\u7684\u591a\u79cd\u5e94\u7528\u8fdb\u884c\u4e86\u4f18\u5316\u3002<\/p>\n \u7edd\u7f18\u4f53\u4e0a\u7845 (SOI) \u6676\u5706<\/strong><\/p>\n WaferPro<\/strong>\u00a0\u73b0\u63d0\u4f9b\u9ad8\u8d28\u91cf\u7684\u7edd\u7f18\u4f53\u4e0a\u7845\uff08SOI\uff09\u6676\u5706\uff0c\u8fdb\u4e00\u6b65\u6269\u5c55\u4e86\u6211\u4eec\u5168\u9762\u7684\u7845\u6676\u5706\u4ea7\u54c1\u7ebf\u3002\u6211\u4eec\u9876\u7ea7\u7684 SOI \u6676\u5706\u9488\u5bf9\u4ece\u4f20\u611f\u5668\u5230\u529f\u7387\u7ec4\u4ef6\u7684\u591a\u79cd\u5e94\u7528\u8fdb\u884c\u4e86\u4f18\u5316\u3002<\/p>\n \u4e0e CMOS \u5668\u4ef6\u76f8\u6bd4\uff0c\u57fa\u4e8e SOI \u6676\u5706\u5236\u9020\u7684\u82af\u7247\u901f\u5ea6\u63d0\u9ad8\u4e86 30%\uff0c\u529f\u8017\u964d\u4f4e\u4e86 80%\u3002SOI \u7ed3\u6784\u7531\u4e09\u5c42\u7ec4\u6210\uff1a\u7528\u4e8e\u6676\u4f53\u7ba1\u5236\u9020\u7684\u4e0a\u5c42\u6709\u6e90\u5668\u4ef6\u5c42\u3001\u57cb\u6c27\u5c42\uff08BOX\uff09\u7edd\u7f18\u5c42\u4ee5\u53ca\u5e95\u5c42\u652f\u6491\u6676\u5706\u5c42\u3002<\/p>\n \u57cb\u6c27\u5c42\uff08BOX\uff09\u9694\u79bb\u4e86\u7cbe\u5bc6\u5668\u4ef6\uff0c\u4f7f\u5176\u514d\u53d7\u73af\u5883\u5e72\u6270\uff0c\u540c\u65f6\u63d0\u5347\u4e86\u6027\u80fd\u3002\u6784\u5efa\u5728\u4e0a\u5c42\u5668\u4ef6\u5c42\u4e2d\u7684\u6676\u4f53\u7ba1\u63a8\u52a8\u4e86 SOI \u6280\u672f\u7684\u901f\u5ea6\u548c\u6548\u7387\u63d0\u5347\u3002\u5b83\u4eec\u652f\u6301\u590d\u6742\u7684\u8282\u80fd\u914d\u7f6e\uff0c\u5e76\u51cf\u5c11\u4e86\u5b87\u5b99\u5c04\u7ebf\u6216\u8f90\u5c04\u9020\u6210\u7684\u6570\u636e\u4e22\u5931\u3002<\/p>\n \u968f\u7740 SOI \u6676\u5706\u7684\u52a0\u5165\uff0cWaferPro \u73b0\u5728\u4e3a\u8ffd\u6c42\u4e0b\u4e00\u4ee3\u521b\u65b0\u7684\u7814\u53d1\u56e2\u961f\u548c\u5236\u9020\u5546\u63d0\u4f9b\u4e86\u8fd9\u4e00\u5148\u8fdb\u7684\u57fa\u677f\u9009\u62e9\u3002\u6211\u4eec\u7684 SOI \u6676\u5706\u5c06\u5c16\u7aef\u8bbe\u8ba1\u6f5c\u529b\u4e0e\u7ecf\u8fc7\u9a8c\u8bc1\u7684\u6676\u5706\u5236\u9020\u8d28\u91cf\u76f8\u7ed3\u5408\u3002<\/p>\n <\/p>\n SOI \u6676\u5706\u7684\u7c7b\u578b<\/strong><\/p>\n \u5b9a\u5236\u5316\u662f WaferPro \u7684\u91cd\u8981\u57fa\u77f3\uff0c\u6211\u4eec\u59cb\u7ec8\u5c3d\u529b\u6ee1\u8db3\u60a8\u7684\u6240\u6709\u9700\u6c42\u3002\u57fa\u4e8e\u8fd9\u4e00\u7406\u5ff5\uff0cWaferPro \u63d0\u4f9b\u4ee5\u4e0b\u7c7b\u578b\u7684 SOI \u6676\u5706\uff1a<\/p>\n SOI \u7845\u7247<\/a>\u7684\u4e3b\u8981\u5e94\u7528<\/strong><\/p>\n\n
\n\u6b64\u7c7b\u6676\u5706\u7684\u5668\u4ef6\u539a\u5ea6\u4e3a 1\u00b5m \u81f3 300\u00b5m\u3002<\/li>\n
\n\u6b64\u7c7b\u6676\u5706\u7684\u5668\u4ef6\u539a\u5ea6\u5c0f\u4e8e 500nm\u3002<\/li>\n
\n\u5668\u4ef6\u539a\u5ea6\u7684\u5747\u5300\u6027\u53ef\u4f4e\u81f3\u539a\u819c SOI \u7684 \u00b10.5\u00b5m \u548c\u8d85\u8584 SOI \u7684 \u00b110nm\u3002<\/li>\n
\n\u6b64\u7c7b SOI \u6676\u5706\u5177\u6709\u6781\u4f4e\u7684\u5f2f\u66f2\u5ea6\uff08BOW\uff09\/\u7fd8\u66f2\u5ea6\uff08WARP\uff09\/\u603b\u539a\u5ea6\u53d8\u5316\uff08TTV\uff09\uff0c\u9002\u7528\u4e8e\u7279\u5b9a\u5e94\u7528\u3002<\/li>\n<\/ol>\n