{"id":230,"date":"2025-03-04T13:59:32","date_gmt":"2025-03-04T05:59:32","guid":{"rendered":"https:\/\/www.bihec.com\/silicon-materials\/?p=230"},"modified":"2025-03-04T13:59:32","modified_gmt":"2025-03-04T05:59:32","slug":"4%e8%8b%b1%e5%af%b8%e7%a1%85%e7%89%87","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/silicon-materials\/4%e8%8b%b1%e5%af%b8%e7%a1%85%e7%89%87\/","title":{"rendered":"\u7f8e\u56fdSilicon Materials 4\u82f1\u5bf8(100.0mm)\u7845\u6676\u5706 \u7845\u6676\u7247 \u6676\u5706\u63ba\u6742 \u539a\u5ea6\u8303\u56f4250\u20131800\u5fae\u7c73"},"content":{"rendered":"
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Silicon Materials<\/a>, Inc. \u7684\u6676\u5706<\/a>\u5236\u9020\u8fc7\u7a0b\u5b8c\u5168\u900f\u660e\u3002\u6240\u6709\u6676\u5706\u751f\u4ea7\u4ece\u521d\u59cb\u7684\u591a\u6676\u7845<\/a>\u6279\u6b21\u5230\u6700\u7ec8\u5305\u88c5\u5747\u53ef\u8ffd\u6eaf\u3002\u4ea7\u54c1\u7684\u7a33\u5b9a\u6027\u6e90\u4e8e\u5bf9\u6574\u4e2a\u5236\u9020\u5468\u671f\u7684\u4e25\u683c\u63a7\u5236\u3002\u8fd9\u4e9b\u4f18\u52bf\u4f7f Silicon Materials, Inc. \u6210\u4e3a\u4f18\u79c0\u7684\u957f\u671f\u5408\u4f5c\u4f19\u4f34\u3002<\/p>\n Silicon Materials, Inc. \u63d0\u4f9b\u591a\u79cd\u89c4\u683c\u7684\u6676\u5706\u53ca\u76f8\u5173\u670d\u52a1\uff0c\u6ee1\u8db3\u534a\u5bfc\u4f53\u884c\u4e1a\u7684\u4e0d\u540c\u9700\u6c42\u3002<\/p>\n\u4ea7\u54c1<\/strong><\/h3>\n
\u4e3b\u8981\u539f\u6750\u6599<\/strong>\uff1a\u91c7\u7528\u7f8e\u56fd\u751f\u4ea7\u7684\u539f\u751f\u534a\u5bfc\u4f53\u7ea7\u591a\u6676\u7845\u3002<\/h4>\n
\n\u6676\u5706\u4ea7\u54c1<\/strong><\/h4>\n
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\n\u5b9a\u5236\u8584\u819c<\/a>\u548c\u670d\u52a1<\/strong><\/h4>\n
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\n\u4f18\u52bf<\/strong><\/h4>\n
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4 \u82f1\u5bf8\uff08100.0\u6beb\u7c73\uff09\u7845\u6676\u5706<\/a>\u89c4\u683c<\/strong><\/h3>\n
\n\u6750\u6599\u7279\u6027<\/strong><\/h4>\n
\n\n
\n \n\u53c2\u6570<\/th>\n \u7279\u6027<\/th>\n ASTM \u63a7\u5236\u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n \n \u751f\u957f\u65b9\u6cd5<\/td>\n \u76f4\u62c9\u6cd5\uff08Cz\uff09\u3001\u6d6e\u533a\u6cd5\uff08Fz\uff09\u3001\u78c1\u63a7\u76f4\u62c9\u6cd5\uff08MCz\uff09<\/td>\n –<\/td>\n<\/tr>\n \n \u7c7b\u578b\/\u63ba\u6742<\/td>\n P \u578b – \u787c\uff08Boron\uff09
\nN \u578b – \u78f7\uff08Phosphorous\uff09
\nN \u578b – \u9511\uff08Antimony\uff09
\nN \u578b – \u7837\uff08Arsenic\uff09
\n\u672a\u63ba\u6742\uff08Undoped\uff09<\/td>\nF42<\/td>\n<\/tr>\n \n \u6676\u5411<\/td>\n <100>\u3001<111>\u3001<110>\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5207\u5272\u65b9\u5411\uff08slice ON \u6216 slice OFF\uff09<\/td>\n F26<\/td>\n<\/tr>\n \n \u6c27\u542b\u91cf<\/td>\n 10 – 19 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n F121<\/td>\n<\/tr>\n \n \u78b3\u542b\u91cf<\/td>\n < 1 ppmA\uff0c\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\n F123<\/td>\n<\/tr>\n \n \u7535\u963b\u7387\u8303\u56f4<\/td>\n – P \u578b\uff08\u787c\uff09\uff1a0.001 – 50 \u6b27\u59c6\u00b7\u5398\u7c73
\n– N \u578b\uff08\u78f7\uff09\uff1a0.1 – 40 \u6b27\u59c6\u00b7\u5398\u7c73
\n– N \u578b\uff08\u9511\uff09\uff1a0.01 – 0.025 \u6b27\u59c6\u00b7\u5398\u7c73
\n– N \u578b\uff08\u7837\uff09\uff1a0.001 – 0.005 \u6b27\u59c6\u00b7\u5398\u7c73
\n– \u672a\u63ba\u6742\uff1a> 100 \u6b27\u59c6\u00b7\u5398\u7c73
\n\u53ef\u6839\u636e\u5ba2\u6237\u8981\u6c42\u63d0\u4f9b\u5b9a\u5236\u516c\u5dee<\/td>\nF84<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n\u673a\u68b0\u7279\u6027<\/strong><\/h4>\n
\n\n
\n \n\u53c2\u6570<\/th>\n Prime A<\/th>\n Prime B<\/th>\n Test<\/th>\n ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n \n \u76f4\u5f84<\/td>\n 100 \u00b1 0.2 mm<\/td>\n 100 \u00b1 0.2 mm<\/td>\n 100 \u00b1 0.5 mm<\/td>\n F2074<\/td>\n<\/tr>\n \n \u539a\u5ea6<\/td>\n 525 \u00b1 20 \u00b5m\uff08\u6807\u51c6\uff09
\n300 \u00b1 20 \u00b5m
\n381 \u00b1 20 \u00b5m
\n625 \u00b1 20 \u00b5m
\n700 \u00b1 20 \u00b5m
\n800 \u00b1 20 \u00b5m
\n1000 \u00b1 20 \u00b5m<\/td>\n525 \u00b1 20 \u00b5m\uff08\u6807\u51c6\uff09
\n300 \u00b1 20 \u00b5m
\n381 \u00b1 20 \u00b5m
\n625 \u00b1 20 \u00b5m
\n700 \u00b1 20 \u00b5m
\n800 \u00b1 20 \u00b5m
\n1000 \u00b1 20 \u00b5m<\/td>\n525 \u00b1 20 \u00b5m\uff08\u6807\u51c6\uff09
\n300 \u00b1 20 \u00b5m
\n381 \u00b1 20 \u00b5m
\n625 \u00b1 20 \u00b5m
\n700 \u00b1 20 \u00b5m
\n800 \u00b1 20 \u00b5m
\n1000 \u00b1 20 \u00b5m<\/td>\nF533<\/td>\n<\/tr>\n \n TTV\uff08\u603b\u539a\u5ea6\u53d8\u5316\uff09<\/td>\n < 2 \u00b5m
\n< 5 \u00b5m<\/td>\n< 10 \u00b5m<\/td>\n < 15 \u00b5m<\/td>\n F657<\/td>\n<\/tr>\n \n \u5f2f\u66f2\u5ea6\uff08Bow\uff09<\/td>\n < 30 \u00b5m<\/td>\n < 30 \u00b5m<\/td>\n < 40 \u00b5m<\/td>\n F657<\/td>\n<\/tr>\n \n \u7fd8\u66f2\u5ea6\uff08Warp\uff09<\/td>\n < 30 \u00b5m<\/td>\n < 30 \u00b5m<\/td>\n < 40 \u00b5m<\/td>\n F657<\/td>\n<\/tr>\n \n \u8fb9\u7f18\u5012\u89d2<\/td>\n \u7b26\u5408 SEMI \u6807\u51c6\u6216\u5ba2\u6237\u8981\u6c42<\/td>\n –<\/td>\n –<\/td>\n F928<\/td>\n<\/tr>\n \n \u6807\u8bb0<\/td>\n \u4ec5\u4e3b SEMI \u5e73\u8fb9\uff0c\u63d0\u4f9b SEMI \u6807\u51c6\u5e73\u8fb9\u3001\u7f3a\u53e3\u3001\u5706\u5f62\u8fb9\u7f18\u6216\u5ba2\u6237\u5b9a\u5236\u8981\u6c42<\/td>\n F847, F671<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n\u8868\u9762\u8d28\u91cf<\/strong><\/h4>\n
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\n \n\u53c2\u6570<\/th>\n Prime A<\/th>\n Prime B<\/th>\n Test<\/th>\n ASTM \u65b9\u6cd5<\/th>\n<\/tr>\n<\/thead>\n \n \u6b63\u9762\u6807\u51c6<\/strong><\/td>\n <\/td>\n <\/td>\n <\/td>\n <\/td>\n<\/tr>\n \n \u8868\u9762\u72b6\u6001<\/td>\n \u5316\u5b66\u673a\u68b0\u629b\u5149\uff08CMP\uff09<\/td>\n –<\/td>\n –<\/td>\n F523<\/td>\n<\/tr>\n \n \u8868\u9762\u7c97\u7cd9\u5ea6<\/td>\n < 2 \u00c5<\/td>\n < 2 \u00c5<\/td>\n < 2 \u00c5<\/td>\n –<\/td>\n<\/tr>\n \n \u6c61\u67d3\u9897\u7c92\uff08>0.3 \u00b5m\uff09<\/td>\n < 10<\/td>\n < 10<\/td>\n < 20<\/td>\n F523<\/td>\n<\/tr>\n \n \u96fe\u5ea6\u3001\u51f9\u5751\u3001\u6a58\u76ae<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n \n \u952f\u75d5\u3001\u6761\u7eb9<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n \n \u80cc\u9762\u6807\u51c6<\/strong><\/td>\n <\/td>\n <\/td>\n <\/td>\n <\/td>\n<\/tr>\n \n \u8868\u9762\u72b6\u6001<\/td>\n \u78b1\u8680\u523b<\/td>\n –<\/td>\n –<\/td>\n F523<\/td>\n<\/tr>\n \n \u88c2\u7eb9\u3001\u952f\u75d5\u3001\u6c61\u6e0d<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n \u65e0<\/td>\n F523<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
\n\u5305\u88c5\u9009\u9879<\/strong><\/h4>\n