\n\n Specifications<\/p>\n<\/div>\n<\/td>\n | \n <\/div>\n<\/td>\n<\/tr>\n |
\n\n Measuring range<\/p>\n<\/div>\n<\/td>\n | \n\n 1\u00d710-6<\/sup><\/span>\u00a0to 1333 mbar (7.5\u00d710-7<\/sup><\/span>\u00a0to 1000 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Measuring principle 1×10-6<\/sup>\u00a0to 1.5 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n MEMS Pirani thermal conductivity (Heat-loss)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Measuring principle 2 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n MEMS piezo resistive diaphragm<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Measuring principle 1.5 to 2 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n Blended MEMS Pirani \/ piezo reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 1\u00d710-5<\/sup>\u00a0to 9.99\u00d710-5<\/sup><\/p>\n<\/div>\n<\/td>\n | \n\n 25% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 1\u00d710-4<\/sup>\u00a0to 7.99 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n 5 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 8.00 to 99.9 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n 1% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 100 to 800 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n 0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 800 to 1099 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n 0.25 % of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Accuracy 1100 to 1333 mbar<\/p>\n<\/div>\n<\/td>\n | \n\n 0.5% of reading<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Maximum measuring resolution<\/p>\n<\/div>\n<\/td>\n | \n\n 1.0E-7 mbar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 1<\/p>\n<\/div>\n<\/td>\n | \n\n 1 VDC \/ decade (0.5VDC at 1.0E-6 mbar)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 2 (MKS 901P, 910, 925 Emulation)<\/p>\n<\/div>\n<\/td>\n | \n\n 1 VDC \/ decade (1.0VDC at 1.0E-5 Torr)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 3 (MKS GP 275 Convectron\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n | \n\n 0.375 to 5.659 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 4 (MKS 523)<\/p>\n<\/div>\n<\/td>\n | \n\n 0.5 VDC \/ decade (MKS 523)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 5 (Inficon PSG500, PSG502, PSG510, PSG512 )<\/p>\n<\/div>\n<\/td>\n | \n\n 1.9 – 10 VDC (Inficon PSG55x, Leybold TTR91)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 6 (Leybold TTR91, TTR96, TTR101)<\/p>\n<\/div>\n<\/td>\n | \n\n 1.5 – 8.5 VDC (Pfeiffer TPR260\/27x\/28x)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 7 (MKS GP 275 Convectron\u00ae<\/sup>)<\/p>\n<\/div>\n<\/td>\n | \n\n 1.9 – 9.1 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 8 (MKS GP 390 MicroIon)<\/p>\n<\/div>\n<\/td>\n | \n\n 0.5 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output Signal 9 (MKS 971, 972, 974B)<\/p>\n<\/div>\n<\/td>\n | \n\n 0.5 VDC \/ decade (MKS 971B, 972B, 974B)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 10 (Inficon Gemini output 1)<\/p>\n<\/div>\n<\/td>\n | \n\n 1 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 11 (Inficon Gemini output 2)<\/p>\n<\/div>\n<\/td>\n | \n\n 1.33\u00a0 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal 12 (Inficon Gemini output 3)<\/p>\n<\/div>\n<\/td>\n | \n\n 0.6 VDC \/ decade<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Output signal resolution<\/p>\n<\/div>\n<\/td>\n | \n\n 16 bit<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Solid state relay contact rating (optional)<\/p>\n<\/div>\n<\/td>\n | \n\n 250 mA, 50 VDC \/ VAC peak<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Environment conditions<\/p>\n<\/div>\n<\/td>\n | \n <\/div>\n<\/td>\n<\/tr>\n |
\n\n Operating ambient temperature<\/p>\n<\/div>\n<\/td>\n | \n\n -40 to +50 \u00b0C (-40 to +122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Media temperature<\/p>\n<\/div>\n<\/td>\n | \n\n -20 to +50 \u00b0C (-58 to 122 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Storage ambient temperature<\/p>\n<\/div>\n<\/td>\n | \n\n -40 to +125 \u00b0C\u00a0 (-40 to +257 \u00b0F)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Maximum media pressure<\/p>\n<\/div>\n<\/td>\n | \n\n 10 bar<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Mounting position<\/p>\n<\/div>\n<\/td>\n | \n\n Arbitrary<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Protection rating, EN 60529\/A2:2013<\/p>\n<\/div>\n<\/td>\n | \n\n IP40<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Humidity, IEC 68-2-38<\/p>\n<\/div>\n<\/td>\n | \n\n 98%, non-condensing<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Power supply<\/p>\n<\/div>\n<\/td>\n | \n <\/div>\n<\/td>\n<\/tr>\n |
\n\n Supply voltage<\/p>\n<\/div>\n<\/td>\n | \n\n 12-30 VDC<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Power consumption<\/p>\n<\/div>\n<\/td>\n | \n\n 350 mW (Max)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Reverse polarity protection<\/p>\n<\/div>\n<\/td>\n | \n\n Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Overvoltage protection<\/p>\n<\/div>\n<\/td>\n | \n\n Yes<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Internal fuse<\/p>\n<\/div>\n<\/td>\n | \n\n 100 mA (Thermal recoverable)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Materials<\/p>\n<\/div>\n<\/td>\n | \n <\/div>\n<\/td>\n<\/tr>\n |
\n\n Vacuum process flange<\/p>\n<\/div>\n<\/td>\n | \n\n 316 stainless steel<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Enclosure<\/p>\n<\/div>\n<\/td>\n | \n\n 316 stainless steel \/ Aluminum<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Vacuum exposed materials (media wetted)<\/p>\n<\/div>\n<\/td>\n | \n\n 316 Stainless steel, Kovar, glass, silicon, nickel, aluminum, SiO2<\/sub>, Si3<\/sub>N4<\/sub>, gold, Viton\u00ae, low out-gassing epoxy resin, solder, RO4305<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Vacuum exposed materials (media wetted) Ceramic protected<\/p>\n<\/div>\n<\/td>\n | \n\n 316 Stainless steel, Viton\u00ae<\/sup>, Aluminum oxide ceramic (AI2<\/sub>O3<\/sub>)<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Vacuum exposed materials (media wetted) Parylene protected<\/p>\n<\/div>\n<\/td>\n | \n\n 316 Stainless steel, Viton\u00ae<\/sup>, Parylene<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Process leak tightness<\/p>\n<\/div>\n<\/td>\n | \n\n <1\u00b710-9<\/sup>\u00a0mbar\u00b7l\/s<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n Approvals<\/p>\n<\/div>\n<\/td>\n | \n <\/div>\n<\/td>\n<\/tr>\n |
\n\n CE<\/p>\n<\/div>\n<\/td>\n | \n\n EMC directive 2014\/30\/EU<\/p>\n<\/div>\n<\/td>\n<\/tr>\n |
\n\n RoHS compliance<\/p>\n<\/div>\n<\/td>\n | \n\n Directive EU 2015\/863<\/p>\n<\/div>\n<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n<\/div>\n<\/div>\n
SENS4<\/a>\nSENS4 VPM-5<\/a>\nSENS4\u4ee3\u7406<\/a>\nSENS4\u4f20\u611f\u5668<\/a>\nSENS4\u771f\u7a7a\u4f20\u611f\u5668<\/a>\nVPM-5<\/a>\n\u4e39\u9ea6SENS4<\/a>\n\u4f20\u611f\u5668<\/a>\n\u5bbd\u91cf\u7a0b\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668<\/a>\n\u771f\u7a7a\u6d4b\u91cf<\/a><\/div>","protected":false},"excerpt":{"rendered":"\u4e39\u9ea6 SENS4 VPM-5 \u771f\u7a7a\u538b\u529b\u4f20\u611f\u5668,SMARTPIRANI™ \u5bbd\u91cf\u7a0b\u76ae\u62c9\u5c3c\u4f20\u611f\u5668 Sens4 \u5f00\u53d1\u3001\u5236\u9020\u548c\u9500\u552e\u7528\u4e8e\u5de5\u4e1a\u548c\u79d1\u5b66\u5e94\u7528\u7684\u771f\u7a7a\u3001\u538b\u529b\u548c\u6e29\u5ea6\u6d4b\u91cf\u548c\u63a7\u5236 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