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\u4e3a\u00a0XPS<\/a> \/ UPS<\/a> \/ ARPES<\/a> \/ AES<\/a> \/\u00a0<\/strong><\/span>EELS<\/a>\u00a0<\/strong>\/ ISS<\/a> \/ IPES \/ LEIPS<\/strong>\u00a0\u6280\u672f<\/span>\u9886\u57df\u7684\u7814\u7a76\u9700\u6c42\u63d0\u4f9b\u5b9a\u5236\u3001\u5e7f\u6cdb\u7684\u89e3\u51b3\u65b9\u6848<\/span><\/li>\n
\u591a\u8154\u5ba4<\/a>\u81ea\u52a8\u5316\u5de5\u827a<\/strong><\/li>\n
\u5b9e\u9a8c\u7a0b\u5e8f\u7684\u5b8c\u5168\u81ea\u52a8\u5316<\/strong><\/span>\u00a0<\/span><\/li>\n
\u5782\u76f4\u6216\u6c34\u5e73\u6837\u54c1\u65b9\u5411<\/span><\/li>\n
\u534a\u7403\u5f62\u80fd\u91cf\u5206\u6790\u4eea EA15<\/a> UHV\u00a0<\/strong>\u53ca\u8bbe\u5907<\/span>\u00a0<\/span><\/li>\n
\u9ad8\u529f\u7387\u53cc\u9633\u6781\u00a0X \u5c04\u7ebf\u6e90<\/a>\uff0c\u5e26<\/strong>\u5149\u6805 – AlK\u03b1 &am p<\/a>; AgL\u03b1\uff0c<\/span>\u5e26 \u7535\u6e90<\/a><\/span><\/li>\n
\u9ad8\u529f\u7387\u53cc\u9633\u6781\uff0c\u975e\u5355\u8272X\u5c04\u7ebf\u6e90<\/a> –\u00a0<\/strong>AlK\u03b1\u548cMgK\u03b1\uff0c<\/span>\u5e26\u7535\u6e90<\/span><\/li>\n
\u5e26\u7535\u6e90\u7684\u00a0UV \u6e90<\/strong><\/span><\/li>\n
\u5e26\u7535\u6e90\u7684\u6cdb\u6d2a\u6e90<\/a><\/strong><\/span><\/li>\n
\u7528\u4e8e\u6df1\u5ea6\u5256\u6790\u6216\u6e05\u6d01\u7684\u79bb\u5b50\u6e90<\/a><\/strong><\/span><\/li>\n
\u7535\u52a8\u6216\u624b\u52a8\u00a0 4-6 \u8f74<\/strong>\u673a\u68b0\u624b<\/a><\/strong>\uff0c<\/a>\u5e26\u63a5\u6536\u7ad9\u80fd\u591f\u5b9e\u73b0\u4eceLHe\/LN \u7cfb\u5217_{2<\/sub><\/strong>\u53ef\u627f\u53d7\u9ad8\u8fbe\u00a01400\u00b0C<\/strong>\u00a0\u7684\u9ad8\u6e29<\/span><\/li>\n}
\u4e0d\u540c\u7684\u6837\u54c1\u67b6<\/a><\/strong><\/a>\u5c3a\u5bf8\uff1a\u4ece 10\u00d710 mm \u5230 1 \u82f1\u5bf8<\/span><\/li>\n
\u5206\u6790\u5ba4<\/strong>\u76f4\u5f84 450 \u6beb\u7c73<\/span><\/li>\n
\u6781\u9650\u538b\u529b<\/strong>\u964d\u81f3 10<\/span>^{-11<\/sup><\/span>mbar\uff0c\u5177\u4f53\u53d6\u51b3\u4e8e\u6cf5\u7684\u914d\u7f6e<\/span><\/li>\n}
\u6cf5\u7cfb\u7edf\uff08\u57fa\u4e8e\u5907\u7528\u6cf5\u3001TMP\u3001\u79bb\u5b50\u6cf5<\/a>\u548c TSP\uff09<\/span><\/li>\n
\u5e26\u8bbe\u5907\u7684 \u771f\u7a7a<\/a>\u8ba1<\/span><\/li>\n
\u6837\u54c1\u67b6\u7684\u00a0Load Lock \u5ba4<\/strong><\/span><\/li>\n
\u53ef\u9760\u3001\u5feb\u901f\u7684\u7ebf\u6027\u4f20\u8f93<\/a>\u7cfb\u7edf<\/strong>\uff0c\u4ece\u8d1f\u8f7d\u9501\u5230\u5206\u6790\u5ba4<\/span><\/li>\n
Viewports \u2013 \u89c2\u5bdf\u7a97\u53e3<\/span><\/li>\n
Bakeout \u7cfb\u7edf<\/span>\u00a0<\/span><\/li>\n
\u7cfb\u7edf\u7684\u53ef\u8c03\u8282\u521a\u6027\u4e3b\u673a\u67b6<\/span>\u00a0<\/span><\/li>\n
\u5e26\u7535\u5b50\u5355\u5143\u7684 19 \u82f1\u5bf8\u673a\u67dc<\/span><\/li>\n
\u7531\u00a0Spectrium<\/a> \u8f6f\u4ef6<\/a>\u548c<\/strong>\u00a0PLC \u5355\u5143\u5b8c\u5168\u63a7\u5236\u7684\u5206\u6790\u8fc7\u7a0b\u548c\u8bbe\u5907<\/strong><\/li>\n<\/ul>\n
\u63cf\u8ff0<\/h2>\n
\u5206\u6790\u5ba4<\/strong>\u914d\u6709 UHV \u6807\u51c6\u7684\u8fde\u63a5\u6cd5\u5170\uff0c\u7528\u4e8e\u8fde\u63a5\u5f53\u524d\u548c\u672a\u6765\u7684\u8bbe\u5907\uff0c\u5305\u62ec\uff1a<\/p>\n
\n
\u5e26\u8bbe\u5907\u7684 \u534a\u7403\u5f62\u80fd\u91cf\u5206\u6790\u4eea<\/a> \/<\/li>\n
\u5e26\u7535\u6e90\u7684 X \u5c04\u7ebf\u53cc\u9633\u6781\u5355\u8272\u6e90\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684 X \u5c04\u7ebf\u53cc\u9633\u6781\u975e\u5355\u8272\u6e90\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684 UV \u5355\u8272 \u5149\u6e90<\/a>\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684 \u7d2b\u5916\u7ebf\u6e90<\/a>\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684\u6cdb\u6d2a\u6e90\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684 \u7535\u5b50\u6e90<\/a>\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684\u79bb\u5b50\u6e90\uff0c\u7528\u4e8e\u6df1\u5ea6\u5256\u6790\u6216\u6e05\u6d01\uff0c<\/li>\n
\u5e26\u7535\u6e90\u7684\u6c14\u7c07\u79bb\u5b50\u6e90\uff0c<\/li>\n
\u6837\u54c1\u8c03\u8282\u5668\u5177\u6709\u8f83\u5bbd\u7684\u6e29\u5ea6\u8303\u56f4\uff08\u4ece LHe\/LN<\/span>_{2<\/sub>\u9ad8\u8fbe 1400\u00b0C\uff09\u3001<\/span><\/li>\n}
\u6cf5\u7ec4\uff08\u57fa\u4e8e\u5907\u7528\u6cf5\u3001TMP\u3001\u79bb\u5b50\u6cf5\u548cTSP\uff0c\u5177\u6709\u5927\u9762\u79efLN<\/span>_{2<\/sub>\u88f9\u5c38\u5e03\uff09\u3001<\/span><\/li>\n}
\u5e26\u8bbe\u5907\u7684\u771f\u7a7a\u8ba1\uff0c<\/li>\n
\u7528\u4e8e\u7ebf\u6027 \u4f20\u8f93\u7cfb\u7edf<\/a>\u7684\u5165\u53e3\uff0c\u4f8b\u5982\u4ece\u8d1f\u8f7d\u9501\u5230\u5206\u6790\u5ba4\uff0c<\/li>\n
\u6837\u54c1\u67b6\u7684 Load Lock \u5ba4\uff0c<\/li>\n
LEED<\/a> \u8bbe\u5907\uff0c<\/li>\n
IPES \/ LEIPS \u8bbe\u5907\uff0c<\/li>\n
viewports \u2013 \u89c2\u5bdf\u7a97\u53e3\uff0c<\/li>\n
\u6b8b\u4f59\u6c14\u4f53\u5206\u6790\u4eea\u3002<\/li>\n<\/ul>\n
\u8be5\u7cfb\u7edf\u7684\u6a21\u5757\u5316\u8bbe\u8ba1<\/strong>\u5141\u8bb8\u901a\u8fc7\u5f84\u5411\u5206\u5e03\u4f20\u8f93\u89e3\u51b3\u65b9\u6848\u6216\u4f20\u8f93\u96a7\u9053\u4e0e\u4efb\u4f55\u5176\u4ed6\u7814\u7a76\u5e73\u53f0\u8fdb\u884c\u7ec4\u5408\u548c\u96c6\u6210\u3002\u00a0\u6700\u7ec8\u8bbe\u8ba1\u548c\u529f\u80fd\u53d6\u51b3\u4e8e\u7cfb\u7edf\u914d\u7f6e\u3002<\/span>\u00a0<\/span><\/p>\n
\u6cf5\u9001<\/a>\u7cfb\u7edf<\/strong>\u662f\u4e0d\u540c\u7c7b\u578b\u6cf5\u7684\u7ec4\u5408\uff0c\u4f8b\u5982\u524d\u7ea7 \u771f\u7a7a\u6cf5<\/a>\u3001\u79bb\u5b50\u6cf5\u3001\u6da1\u8f6e\u6cf5\u6216\u5177\u6709\u5927\u9762\u79ef LN \u7684\u949b\u5347\u534e\u6cf5_{2<\/sub>\u62a4\u7f69\uff0c\u6839\u636e\u7279\u5b9a\u5e94\u7528\u9700\u6c42\u5355\u72ec\u9009\u62e9\uff0c\u4ee5\u5b9e\u73b0\u6700\u4f73\u6cf5\u9001\u6027\u80fd\u3002<\/span>\u00a0<\/span><\/p>\n}
Spectrium \u5206\u6790\u63a7\u5236\u8f6f\u4ef6<\/strong>\u5141\u8bb8\u534a\u7403\u5f62\u80fd\u91cf\u5206\u6790\u4eea<\/a>\u548c\u5404\u79cd\u7c7b\u578b\u7684\u6e90\u96c6\u6210\u548c\u5b8c\u7f8e\u534f\u4f5c\uff0c\u4ece\u800c\u5b9e\u73b0\u8f7b\u677e\u7684\u914d\u65b9\u7f16\u5199\u3001\u81ea\u52a8\u6d4b\u91cf\u63a7\u5236\u548c\u5e7f\u6cdb\u7684\u6570\u636e\u8bb0\u5f55\u3002\u5141\u8bb8\u57fa\u4e8e\u00a0Tango \u5f00\u6e90\u8bbe\u5907<\/strong>\u96c6\u6210\u65b0\u7684\u9644\u52a0\u7ec4\u4ef6<\/a>\u3002<\/span>\u00a0<\/span><\/p>\n
\u9009\u9879<\/h2>\n
\n
\u5e26\u7535\u6e90\u7684\u00a0UV \u5355\u8272\u5149\u6e90<\/strong><\/span><\/li>\n
LEED<\/strong>\u00a0\u8bbe\u5907<\/span><\/li>\n
\u5e26\u8bbe\u5907\u7684<\/span>\u00a0IPES \/ LEIPS<\/strong><\/li>\n
\u5e26\u7535\u6e90\u7684\u7535\u5b50\u6e90<\/strong><\/span><\/li>\n
\u5e26\u7535\u6e90\u7684<\/span>\u6c14\u4f53\u7c07\u79bb\u5b50\u6e90<\/strong><\/span><\/li>\n
\u50a8\u85cf<\/strong>\u5ba4<\/span><\/li>\n
\u5f84\u5411\u5206\u5e03\u5ba4<\/strong>\u6216\u4f20\u8f93\u96a7\u9053
\n<\/span><\/li>\n
\u771f\u7a7a\u624b\u63d0\u7bb1\uff08\u8fd0\u8f93\u7bb1<\/a>\uff09\uff0c<\/strong>\u5728\u8d1f\u8f7d\u9501\u5ba4
\n\u4e2d\u5e26\u7aef\u53e3<\/span><\/li>\n
\u6b8b\u4f59\u6c14\u4f53\u5206\u6790\u4eea<\/span><\/li>\n
\u9ad8\u6e29\u8ba1<\/span><\/li>\n<\/ul>\n
\u6280\u672f<\/h2>\n
\u5149\u7535\u5b50\u80fd\u8c31 \uff08PES\uff09<\/strong>\u00a0\u662f\u4e00\u79cd\u5b9e\u9a8c\u6280\u672f\uff0c\u4e5f\u662f\u7535\u5b50\u80fd\u8c31\u7684\u4e3b\u8981\u53d8\u4f53\u3002\u8be5\u65b9\u6cd5\u57fa\u4e8e\u5149\u7535\u73b0\u8c61\u548c\u5bf9\u5149\u7535\u5b50\u52a8\u80fd\u5206\u5e03\u7684\u5206\u6790\u3002\u53d1\u5c04\u7684\u80fd\u91cf\u662f\u8868\u9762\u6837\u54c1\u53d7\u5230\u7535\u78c1\u8f90\u5c04\u6fc0\u53d1\u7684\u7ed3\u679c\u3002<\/span>\u00a0<\/span><\/p>\n
PES \u6280\u672f\u662f\u6700\u5e38\u7528\u7684\u8868\u9762\u6d4b\u8bd5\u548c\u8584\u5c42\u68c0\u67e5\u65b9\u6cd5\u3002\u5b83\u63d0\u4f9b\u7684\u4fe1\u606f\u5305\u62ec\uff1a\u5b9a\u91cf\u7ec4\u6210\u3001\u539f\u5b50\u952e\u7279\u6027\u3001\u5c42\u539a\u3002\u57fa\u672c\u8fc7\u7a0b\uff08\u5149\u6548\u5e94\uff09\u6d4b\u91cf\u5149\u5b50\u7167\u5c04\u7269\u8d28\u540e\u4ea7\u751f\u7684\u5149\u7535\u5b50\u53d1\u5c04\u3002<\/span>\u00a0<\/span><\/p>\n
\u5305\u62ec\u5206\u6790 PES \u6280\u672f\uff1a<\/span>\u00a0<\/span><\/p>\n
\n
XPS<\/strong>\u00a0\u2013 X \u5c04\u7ebf\u5149\u7535\u5b50\u80fd\u8c31<\/span>\u00a0<\/span><\/li>\n
HAXPES<\/strong>\u00a0\u2013 \u786c X \u5c04\u7ebf\u5149\u8c31<\/span>\u00a0<\/span><\/li>\n
UPS<\/strong>\u00a0\u2013 \u7d2b\u5916\u5149\u7535\u5b50\u80fd\u8c31<\/a><\/span>\u00a0<\/span><\/li>\n
ARPES<\/strong>\u00a0\u2013 \u89d2\u5ea6\u5206\u8fa8\u5149\u7535\u5b50\u80fd\u8c31<\/span>\u00a0<\/span><\/li>\n<\/ul>\n
\u5176\u4ed6\u6280\u672f\uff1a<\/span>\u00a0<\/span><\/p>\n
\n
IPES<\/strong>\u00a0\u2013 \u9006\u5149\u7535\u5b50\u53d1\u5149\u5149\u8c31<\/span>\u00a0<\/span><\/li>\n
LEIPS<\/strong>\u00a0\u2013 \u4f4e\u80fd\u91cf\u9006\u5149\u7535\u5b50\u80fd\u8c31<\/span>\u00a0<\/span><\/li>\n
AES<\/strong>\u00a0\u2013 \u4fc4\u6b47\u7535\u5b50\u80fd\u8c31<\/span>\u00a0<\/span><\/li>\n
EELS<\/strong>\u00a0\u2013 \u7535\u5b50\u80fd\u91cf\u635f\u5931\u8c31<\/span>\u00a0<\/span><\/li>\n
ISS<\/strong>\u00a0\u2013 \u79bb\u5b50\u6563\u5c04\u5149\u8c31<\/span>\u00a0<\/span><\/li>\n<\/ul>\n
PES\u7cfb\u7edf<\/a>\n Prevac<\/a>\n PREVAC \u5149\u7535\u5b50\u80fd\u8c31\u7cfb\u7edf<\/a>\n \u5148\u8fdb\u7684 PES \u7cfb\u7edf<\/a>\n \u5206\u6790\u7cfb\u7edf<\/a><\/div>","protected":false},"excerpt":{"rendered":"
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