{"id":826,"date":"2024-12-04T17:03:41","date_gmt":"2024-12-04T09:03:41","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=826"},"modified":"2024-12-04T17:03:41","modified_gmt":"2024-12-04T09:03:41","slug":"%e6%b3%a2%e5%85%b0prevac-ion-source-is-40e1-%e7%a6%bb%e5%ad%90%e6%ba%90","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/%e6%b3%a2%e5%85%b0prevac-ion-source-is-40e1-%e7%a6%bb%e5%ad%90%e6%ba%90\/","title":{"rendered":"\u6ce2\u5170PREVAC Ion source IS 40E1 \u79bb\u5b50\u6e90"},"content":{"rendered":"

\u79bb\u5b50\u6e90<\/a>IS 40E1<\/a>\u2014\u2014\u53cc\u900f\u955c\u3001\u805a\u7126\u3001\u63d0\u53d6\u5668\u578b\u79bb\u5b50\u67aa<\/a>\u3002\u9002\u7528\u4e8e\u6df1\u5ea6\u5256\u9762\uff08Ar\uff09\uff0c\u53ef\u4e0eO2\u3001H2\u3001\u78b3\u6c22\u5316\u5408\u7269\u548c\u6240\u6709\u60f0\u6027\u6c14\u4f53\u7b49\u53cd\u5e94\u6027\u6c14\u4f53\u4e00\u8d77\u64cd\u4f5c\u3002\u8be5\u79bb\u5b50\u6e90\u80fd\u591f\u4ee5\u63a8\u8350\u7684\u5de5\u4f5c\u8ddd\u79bb\u5bf9\u8868\u9762\u768410 mm x 10 mm\u533a\u57df\u8fdb\u884c\u5149\u6805\u5904\u7406\u3002\u5b83\u7279\u522b\u9002\u7528\u4e8eXPS<\/a>\u3001ISS<\/a>\u548cSIMS<\/a>\u4e2d\u7684\u6df1\u5ea6\u5256\u9762\u3002\u8be5\u6e90\u4e5f\u53ef\u7528\u4e8e\u6837\u54c1\u8868\u9762\u6e05\u6d01<\/a>\u3002<\/p>\n

\"\"<\/p>\n

\u7279\u6027<\/strong><\/p>\n

\u7279\u6b8a\u914d\u7f6e\u7684\u9f3b\u9525
\n\u4f7f\u7528\u60f0\u6027\u6c14\u4f53\uff08Ar\uff09\u548c\u53cd\u5e94\u6027\u6c14\u4f53\uff08O2\u3001H2\u3001\u5bff\u547d\u7f29\u77ed\u7684\u78b3\u6c22\u5316\u5408\u7269\uff09\u8fdb\u884c\u64cd\u4f5c
\n\u8fde\u7eed\u53ef\u53d8\u5149\u6591\u5c3a\u5bf8
\n\u6781\u5747\u5300\u7684\u706b\u5c71\u53e3\/\u5149\u675f\u8f6e\u5ed3
\n\u5185\u7f6e\u53ef\u66f4\u6362\u706f\u4e1d
\n\u7279\u9ad8\u538b\u6c14\u4f53\u5165\u53e3
\n\u5ba4\u5185\u7ef4\u6301\u7279\u9ad8\u538b\u6761\u4ef6
\n\u96c6\u6210\u626b\u63cf\u548c\u504f\u8f6c\u5355\u5143
\n\u5165\u5c04\u7535\u5b50\u675f<\/a>\u89d2\u5ea6\u6821\u6b63\uff08\u7531IS40-PS\u7535\u6e90<\/a>\u63d0\u4f9b\uff09<\/p>\n

\u9009\u914d<\/strong><\/p>\n

\u7ef4\u6069\u8d28\u91cf\u8fc7\u6ee4\u5668
\n\u6c14\u4f53\u8fdb\u6837\u7cfb\u7edf<\/a>
\n\u7ebf\u6027\u504f\u79fb\uff1a25\u300150\u300175\u3001100\u6beb\u7c73
\n\u6cf5\u7ec4\uff082\u7ea7\uff09
\n\u771f\u7a7a<\/a>\u8ba1\u7ec4<\/p>\n

\u6280\u672f\u53c2\u6570<\/strong><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n
Mounting flange<\/td>\nDN 40CF (rotatable)<\/td>\n<\/tr>\n
Gases<\/td>\nAr and reactive gases (O2<\/sub>, H2<\/sub>\u00a0hydrocarbons with reduced lifetime)<\/td>\n<\/tr>\n
Energy range<\/td>\n0.15 keV \u2013 5 keV<\/td>\n<\/tr>\n
Scan area<\/td>\n10 mm x 10 mm (for working distance of 23 mm)<\/td>\n<\/tr>\n
Current density<\/td>\nup<\/a> to\u00a04 mA \/ cm2<\/sup>\u00a0(for distance 23 mm)<\/td>\n<\/tr>\n
Beam current<\/td>\n> 1 \u03bcA (for distance 23 mm)<\/td>\n<\/tr>\n
Cathode type<\/td>\nyttrium oxide coated iridium filament<\/td>\n<\/tr>\n
Small cone angle<\/td>\n50\u00b0<\/td>\n<\/tr>\n
Insertion length<\/td>\n163 mm (standard), OD: 34 mm<\/td>\n<\/tr>\n
FWHM<\/td>\ndependent on working distance
\n(e.g. < 150 \u03bcm for distance 23 mm)<\/td>\n<\/tr>\n
Typical working distance<\/td>\n23 \u2013 120 mm<\/td>\n<\/tr>\n
Bakeout temperature<\/td>\n250 \u00b0C<\/td>\n<\/tr>\n
Working pressure<\/td>\n10-8<\/sup>\u00a0mbar (with max beam current)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n
IS 40E1<\/a>\nPrevac<\/a>\nPREVAC \u79bb\u5b50\u6e90<\/a>\nUHV\u8868\u9762\u79d1\u5b66\u5206\u6790\u7cfb\u7edf<\/a>\n\u6ce2\u5170 PREVAC<\/a>\n\u79bb\u5b50\u6e90<\/a><\/div>","protected":false},"excerpt":{"rendered":"

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