{"id":1290,"date":"2025-06-09T17:29:10","date_gmt":"2025-06-09T09:29:10","guid":{"rendered":"https:\/\/www.bihec.com\/prevac\/?p=1290"},"modified":"2025-06-09T17:29:10","modified_gmt":"2025-06-09T09:29:10","slug":"prevac-%e8%84%89%e5%86%b2%e6%bf%80%e5%85%89%e6%b2%89%e7%a7%af%e7%b3%bb%e7%bb%9f-pld%e7%b3%bb%e7%bb%9f-%e9%80%82%e7%94%a8%e4%ba%8e%e7%94%9f%e9%95%bf%e9%93%81%e7%a3%81%e8%96%84%e8%86%9c%e3%80%81","status":"publish","type":"post","link":"https:\/\/www.bihec.com\/prevac\/prevac-%e8%84%89%e5%86%b2%e6%bf%80%e5%85%89%e6%b2%89%e7%a7%af%e7%b3%bb%e7%bb%9f-pld%e7%b3%bb%e7%bb%9f-%e9%80%82%e7%94%a8%e4%ba%8e%e7%94%9f%e9%95%bf%e9%93%81%e7%a3%81%e8%96%84%e8%86%9c%e3%80%81\/","title":{"rendered":"PREVAC \u8109\u51b2\u6fc0\u5149\u6c89\u79ef\u7cfb\u7edf PLD\u7cfb\u7edf \u9002\u7528\u4e8e\u751f\u957f\u94c1\u78c1\u8584\u819c\u3001\u9676\u74f7\u6c27\u5316\u7269\u3001\u9ad8\u6e29\u8d85\u5bfc\u6750\u6599\u3001\u91d1\u5c5e\u591a\u5c42\u819c"},"content":{"rendered":"
PREVAC \u6807\u51c6 PLD \u7cfb\u7edf<\/a>\u7531\u4e00\u4e2a\u6c89\u79ef\u8fc7\u7a0b\u8154\u4f53\u4e0e\u4e00\u4e2a\u88c5\u8f7d\u4ed3\uff08Load-lock\uff09\u7ec4\u6210\uff0c\u65b9\u4fbf\u5feb\u901f\u5730\u52a0\u8f7d\u6837\u54c1\u3002<\/p>\n \u8fd9\u6b3e\u72ec\u7acb\u5f0f\u8109\u51b2<\/a>\u6fc0\u5149\u6c89\u79ef\uff08PLD\uff09\u7cfb\u7edf<\/a><\/strong>\u9002\u7528\u4e8e\u751f\u957f\u94c1\u78c1\u8584\u819c<\/a>\u3001\u9676\u74f7\u6c27\u5316\u7269<\/a>\u3001\u9ad8\u6e29\u8d85\u5bfc\u6750\u6599<\/a>\u3001\u91d1\u5c5e\u591a\u5c42\u819c<\/a><\/strong>\u7b49\u3002<\/p>\n \u9002\u7528\u4e8e\u5927\u591a\u6570 PLD \u751f\u957f\u5de5\u827a\u7814\u7a76\u9700\u6c42\u7684\u591a\u529f\u80fd\u89e3\u51b3\u65b9\u6848<\/p>\n<\/li>\n \u652f\u6301\u751f\u957f\u6750\u6599\u7c7b\u578b\u5305\u62ec\uff1a<\/p>\n \u94c1\u78c1\u8584\u819c<\/p>\n<\/li>\n \u9676\u74f7\u6c27\u5316\u7269<\/p>\n<\/li>\n \u9ad8\u6e29\u8d85\u5bfc\u6750\u6599<\/p>\n<\/li>\n \u91d1\u5c5e\u591a\u5c42\u819c<\/a>\u7b49<\/p>\n<\/li>\n<\/ul>\n<\/li>\n \u5782\u76f4\u5f0f PLD \u5de5\u827a\u51e0\u4f55\u7ed3\u6784<\/p>\n<\/li>\n \u53ef\u914d\u7f6e EXCIMER \u6fc0\u5149\u5668\u6216 YAG \u6fc0\u5149\u5668\uff0c\u5e76\u914d\u5957\u6fc0\u5149\u5149\u8def\u5f15\u5bfc\u7cfb\u7edf<\/p>\n<\/li>\n 1~4 \u8f74\u7535\u52a8\u6216\u624b\u52a8\u6837\u54c1\u64cd\u63a7\u5668\uff08\u5e26\u63a5\u6536\u5e73\u53f0<\/a>\uff09\uff0c\u52a0\u70ed<\/a>\u6e29\u5ea6\u6700\u9ad8\u53ef\u8fbe 1400\u00b0C<\/strong>\uff08\u91c7\u7528\u9ad8\u7a33\u5b9a\u3001\u957f\u5bff\u547d\u7684\u56fa\u4f53 SiC \u52a0\u70ed\u5143\u4ef6\uff09<\/p>\n<\/li>\n \u4e0d\u540c\u5c3a\u5bf8\u7684\u6837\u54c1\u6258\u67b6\u53ef\u9009\uff1a\u4ece 10\u00d710 mm \u5230 2 \u82f1\u5bf8<\/strong><\/p>\n<\/li>\n \u516d\u4f4d\u9776\u6750<\/a>\u64cd\u63a7\u5668<\/strong>\uff0c\u652f\u6301\u539f\u4f4d\u9776\u6750\u81ea\u52a8\u66f4\u6362\u7cfb\u7edf<\/strong><\/p>\n<\/li>\n \u9776\u6750\u6258\u67b6\u5c3a\u5bf8\uff1a1 \u82f1\u5bf8\u6216 2 \u82f1\u5bf8<\/p>\n<\/li>\n \u9776\u6750\u4e0e\u6837\u54c1\u7684\u5168\u81ea\u52a8\u6216\u624b\u52a8\u4f20\u8f93\u7cfb\u7edf<\/a><\/strong><\/p>\n<\/li>\n \u914d\u5957\u7535\u6e90<\/a>\u7684\u79bb\u5b50\u6e90<\/a>\uff0c\u7528\u4e8e\u6837\u54c1\u8868\u9762\u7684\u6e05\u6d17\u3001\u523b\u8680\u6216\u6d3b\u5316<\/p>\n<\/li>\n \u57fa\u51c6\u771f\u7a7a<\/a>\u5ea6\u8303\u56f4\uff1a1\u00d710\u207b\u2078 \u5230 5\u00d710\u207b\u00b9\u00b9 mbar<\/strong>\uff08\u89c6\u6cf5\u7cfb\u7edf\u914d\u7f6e\u800c\u5b9a\uff09<\/p>\n<\/li>\n \u8154\u4f53\u76f4\u5f84\uff1a\u00d8 490 mm\uff0c\u5177\u5907\u591a\u4e2a\u9644\u52a0\u63a5\u53e3<\/p>\n<\/li>\n \u591a\u79cd\u6cf5\u6d66\u7cfb\u7edf\u7ec4\u5408\uff08\u524d\u7ea7\u6cf5\u3001\u5206\u5b50\u6da1\u8f6e\u6cf5\u3001\u79bb\u5b50\u6cf5<\/a>\u548c\u949b\u5347\u534e\u6cf5\uff09<\/p>\n<\/li>\n \u771f\u7a7a\u8ba1\u53ca\u76f8\u5e94\u914d\u4ef6<\/a><\/p>\n<\/li>\n \u914d\u5907 Z \u8f74\u64cd\u63a7\u5668\u7684\u77f3\u82f1\u6676\u4f53\u76d1\u63a7\u5668\uff0c\u7528\u4e8e\u6c89\u79ef\u901f\u7387\u4e0e\u819c\u539a\u76d1\u6d4b\uff08\u53ef\u6d4b\u7126\u70b9\u4f4d\u7f6e\uff09<\/p>\n<\/li>\n Load-lock \u8154\u4f53\u53ef\u540c\u65f6\u4f20\u8f93\u6837\u54c1\u548c\u9776\u6750<\/p>\n<\/li>\n \u5feb\u901f\u53ef\u9760\u7684\u7ebf\u6027\u4f20\u8f93<\/a>\u7cfb\u7edf\uff0c\u7528\u4e8e\u4ece Load-lock \u5411\u8fc7\u7a0b\u8154\u4f53\u4f20\u8f93<\/p>\n<\/li>\n \u5e26\u906e\u5149\u88c5\u7f6e\u7684\u89c2\u5bdf\u7a97\u53e3<\/p>\n<\/li>\n \u96c6\u6210\u5439\u626b\u7ba1\u7ebf\u7684\u6c34\u51b7\u7cfb\u7edf\uff0c\u7528\u4e8e\u5347\u6e29\u524d\u51c6\u5907<\/p>\n<\/li>\n \u7cfb\u7edf\u70d8\u70e4\u7ec4\u4ef6<\/a><\/p>\n<\/li>\n \u53ef\u8c03\u5f0f\u521a\u6027\u4e3b\u6846\u67b6\u7ed3\u6784<\/p>\n<\/li>\n \u914d\u5907\u7535\u5b50<\/a>\u5355\u5143\u7684 19 \u82f1\u5bf8\u63a7\u5236\u67dc<\/strong><\/p>\n<\/li>\n<\/ul>\n RHEED<\/a> \/ TorrRHEED<\/a> \u53cd\u5c04\u5f0f\u9ad8\u80fd\u7535\u5b50\u884d\u5c04\u8bbe\u5907<\/strong>\uff08\u542b\u5b8c\u6574\u914d\u5957\uff09<\/p>\n<\/li>\n \u7535\u52a8\u6216\u624b\u52a8\u906e\u5149\u5668<\/strong>\uff08\u8ddf\u968f\u6837\u54c1\uff0c\u53ef\u7528\u4e8e\u659c\u5411\u5c42\u6216\u63a9\u819c\u6c89\u79ef\uff09<\/p>\n<\/li>\n \u6fc0\u5149\u529f\u7387\u4f20\u611f\u5668<\/strong><\/p>\n<\/li>\n \u9644\u52a0\u5b58\u50a8\u8154\u4f53<\/strong><\/p>\n<\/li>\n \u5185\u7f6e\u9632\u62a4\u7f69<\/strong><\/p>\n<\/li>\n \u4ea4\u53c9\u6c61\u67d3\u9632\u62a4\u7f69<\/strong><\/p>\n<\/li>\n \u771f\u7a7a\u624b\u63d0\u7bb1\uff08\u4f20\u8f93\u7bb1\uff09<\/strong>\uff0c\u5e26\u6709\u8fde\u63a5\u81f3 Load-lock \u8154\u4f53\u7684\u63a5\u53e3<\/p>\n<\/li>\n \u9644\u52a0\u6c14\u4f53\u8f93\u9001\u7cfb\u7edf<\/a><\/strong>\uff08\u4f8b\u5982\u7528\u4e8e\u53cd\u5e94\u6027\u6c89\u79ef\u5de5\u827a\uff09<\/p>\n<\/li>\n \u6b8b\u4f59\u6c14\u4f53\u5206\u6790\u4eea\uff08RGA\uff09<\/strong><\/p>\n<\/li>\n \u675f\u6d41\u901a\u91cf\u76d1\u6d4b\u5668\uff08Beam Flux Monitor\uff09<\/strong><\/p>\n<\/li>\n \u52a0\u70ed\u89c2\u5bdf\u7a97<\/strong>\uff08\u7528\u4e8e\u8bca\u65ad\u8bbe\u5907\uff09<\/p>\n<\/li>\n \u9ad8\u6e29\u8ba1 \/ \u5149\u5b66\u9ad8\u6e29\u6d4b\u6e29\u4eea\uff08Pyrometer\uff09<\/strong><\/p>\n<\/li>\n \u692d\u504f\u4eea\uff08Ellip<\/a>someter\uff09<\/strong><\/p>\n<\/li>\n \u901a\u8fc7 PLC \u63a7\u5236\u5355\u5143\u4e0e Synthesium \u8f6f\u4ef6<\/a>\u5b9e\u73b0\u5bf9\u6c89\u79ef\u5de5\u827a\u4e0e\u6574\u5957\u8bbe\u5907\u7684\u5168\u6d41\u7a0b\u63a7\u5236<\/strong><\/p>\n<\/li>\n<\/ul>\n
\n\u7279\u70b9\u4e0e\u63cf\u8ff0\uff1a<\/h3>\n
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\u9009\u9879<\/strong><\/h3>\n
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