\n\nMounting flange<\/td>\n | DN 40CF (rotatable)<\/td>\n<\/tr>\n |
\nTemperature range (for evaporated materials)<\/td>\n | 160 \u00b0C \u2013 2300 \u00b0C (3300 \u00b0C for molybdenum connector)<\/td>\n<\/tr>\n |
\nFilament current<\/td>\n | typically 1.8 \u2013 2.2 A, max 2.3 A<\/td>\n<\/tr>\n |
\nEvaporating rod diameter<\/td>\n | 2 mm standard (other on request), step 2 mm, wire feed 25 mm wire length 43 mm<\/td>\n<\/tr>\n |
\nWater cooling (required)<\/td>\n | water flow: > 0.5 l\/min., temperature: 20-30 \u00b0C, max pressure: 6 bar<\/td>\n<\/tr>\n |
\nExit aperture diameters<\/td>\n | set 1: ID 4, ID 6, ID 7.4 (standard) set 2: ID 10, ID 14, ID 19<\/td>\n<\/tr>\n |
\nType of shutter<\/td>\n | manual or pneumatic<\/td>\n<\/tr>\n |
\nPower<\/td>\n | \u2013 50 W\u00a0for high vapor pressure materials \n\u2013 up to\u00a0200 W\u00a0for crucibles and thick wires<\/td>\n<\/tr>\n |
\nEnergy range<\/td>\n | 1 \u2013 1500 eV<\/td>\n<\/tr>\n |
\nCathode type<\/td>\n | thoriated tungsten<\/td>\n<\/tr>\n |
\nCrucible type (option)<\/td>\n | Knudsen cell type made from: Mo, W, liner PBN, Al2<\/sub>O3<\/sub><\/td>\n<\/tr>\n\nCrucibles volume<\/td>\n | 0.07 ml<\/td>\n<\/tr>\n | \nEvaporated materials<\/td>\n | all typical materials according to\u00a0crucible type<\/td>\n<\/tr>\n | \n\u5176\u4ed6\u4eba<\/td>\n | \u2013 flux regulation via ion current incl. electrode, feedthrough, display unit and PID-regulator \n\u2013 rear-loading evaporant<\/td>\n<\/tr>\n | \nInsertion length<\/td>\n | min. 190 mm (other on request) OD: 34.8 mm<\/td>\n<\/tr>\n | \nDeposition area<\/td>\n | dependent on working distance (e.g. 6 mm for distance 25 mm \u2013 ID 4, 33 mm for distance 75 mm \u2013 ID 19)<\/td>\n<\/tr>\n | \nWorking distance<\/td>\n | 25 \u2013 75 mm (optimum)<\/td>\n<\/tr>\n | \nBakeout temperature<\/td>\n | up to\u00a0250\u00b0C<\/td>\n<\/tr>\n | \nWorking pressure<\/td>\n | <10-5<\/sup>\u00a0mbar<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n <\/p>\n
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