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idonus<\/a> \u6c22\u6c1f\u9178\uff08HF\uff09\u84b8\u6c7d\u76f8\u8680\u523b\uff08VPE<\/a>\uff09\u7cfb\u7edf\u662f\u4e00\u79cd\u6d01\u51c0\u5ba4\u5fae\u52a0\u5de5\u8bbe\u5907\u3002HF\u84b8\u6c7d\u901a\u8fc7\u70ed\u63a7\u8680\u523b\u4e8c\u6c27\u5316\u7845<\/a>\u5c42\uff0c\u5b9e\u73b0\u65e0\u7c98\u9644\u91ca\u653e\u5fae\u673a\u7535\u7cfb\u7edf<\/a>\uff08MEMS<\/a>\uff09\u3002<\/p>\n idonus \u63d0\u4f9b\u591a\u79cd\u6c22\u6c1f\u9178\uff08HF\uff09\u84b8\u6c7d\u76f8\u8680\u523b\uff08VPE\uff09\u4ea7\u54c1\u3002HF VPE\uff08\u4ee5\u4e0b\u7b80\u79f0VPE\uff09\u57fa\u4e8eHF\u9178\u7684\u5316\u5b66\u53cd\u5e94\uff0c\u80fd\u591f\u9009\u62e9\u6027\u8680\u523b\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\uff0c\u800c\u7845\uff08Si\uff09\u4fdd\u6301\u5b8c\u597d\u3002\u6807\u51c6VPE\u9002\u7528\u4e8e\u4e0d\u540c\u76f4\u5f84\u7684\u6676\u5706\uff0c\u5305\u62ec100 mm\u3001150 mm \u548c 200 mm\u3002<\/p>\n idonus \u6c22\u6c1f\u9178\u84b8\u6c7d\u76f8\u8680\u523b\uff08VPE\uff09\u8bbe\u5907\u7528\u4e8e\u6d01\u51c0\u5ba4\u5fae\u52a0\u5de5\u8bbe\u65bd\uff0c\u5b9e\u73b0**\u65e0\u7c98\u9644\uff08stiction-free\uff09**\u7684\u4e8c\u6c27\u5316\u7845\uff08SiO\u2082\uff09\u8680\u523b\u3002VPE \u4ea7\u54c1\u9002\u7528\u4e8e 100 mm\u3001150 mm \u548c 200 mm<\/strong> \u7684\u6676\u5706\uff0c\u5e76\u63d0\u4f9b\u9002\u7528\u4e8e\u66f4\u5c0f\u6676\u5706\u6216\u5355\u4e2a\u82af\u7247\u7684\u5939\u6301\u89e3\u51b3\u65b9\u6848\u3002<\/p>\n VPE \u8bbe\u5907\u53ef\u5b89\u5168\u91ca\u653e\u5fae\u7ed3\u6784\u5668\u4ef6\uff0c\u5c24\u5176\u662f\u5177\u6709\u5fae\u5c0f\u95f4\u9699\u6216\u6613\u788e\u60ac\u6d6e\u6881\u7684\u5668\u4ef6\uff08\u5982\u68b3\u72b6\u9a71\u52a8\u5668\u3001AFM \u63a2\u9488<\/strong>\uff09\u3002\u8fd9\u4e9b\u7ed3\u6784\u5e38\u89c1\u4e8e\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u4e2d\u3002\u7531\u4e8e\u6db2\u6001 HF \u9178\u7684\u5185\u805a\u529b<\/strong>\u53ef\u80fd\u7834\u574f\u5fae\u5c0f\u7ed3\u6784\u6216\u5bfc\u81f4\u5176\u6c38\u4e45\u7c98\u9644\uff0c\u56e0\u6b64\u4f20\u7edf\u6db2\u6001 HF \u9178\u65e0\u6cd5\u7528\u4e8e\u6b64\u7c7b\u5de5\u827a\u3002\u800c VPE \u91c7\u7528 HF \u9178\u84b8\u6c7d\u76f8\u8680\u523b\uff0c\u4f7f\u8fd9\u4e9b\u5fae\u7ed3\u6784\u53ef\u4ee5\u65e0\u7c98\u9644\u91ca\u653e\u3002<\/p>\n \u4f18\u70b9<\/strong><\/p>\n HF \u9178\u5e7f\u6cdb\u7528\u4e8e MEMS \u8bbe\u5907\u4e2d\u9009\u62e9\u6027\u8680\u523b SiO\u2082\u3002\u901a\u5e38\uff0c\u5728\u7edd\u7f18\u4f53\u4e0a\u7845\uff08SOI\uff09\u6676\u5706\u4e2d\uff0cSiO\u2082 \u5c42\u65e2\u7528\u4f5c\u7535\u6c14\u7edd\u7f18\u5c42<\/strong>\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u727a\u7272\u5c42<\/strong>\u4ee5\u91ca\u653e MEMS \u5fae\u7ed3\u6784\u3002<\/p>\n \u5728HF \u9178\u84b8\u6c7d\u73af\u5883<\/strong>\u4e2d\u8680\u523b\u662f\u4e00\u79cd\u51c6\u5e72\u6cd5\u5de5\u827a<\/strong>\uff0c\u901a\u8fc7\u53d7\u63a7\u52a0\u70ed\u57fa\u677f\uff0c\u53ef\u4ee5\u8c03\u8282\u6676\u5706\u4e0a\u7684 HF \u9178\u84b8\u6c7d\u91cf\uff0c\u4ece\u800c\u4ee5\u53ef\u91cd\u590d\u7684\u65b9\u5f0f\u63a7\u5236 SiO\u2082 \u7684\u8680\u523b\u901f\u7387<\/strong>\u3002<\/p>\n \u7531\u4e8e\u6676\u5706\u4e0d\u4e0e\u6db2\u4f53\u76f4\u63a5\u63a5\u89e6<\/strong>\uff0cVPE \u8bbe\u5907\u53ef\u4ee5\u5b9e\u73b0\u9ad8\u4ea7\u7387<\/strong>\u7684\u65e0\u7c98\u9644 MEMS \u91ca\u653e\u3002\u91c7\u7528 HF \u84b8\u6c7d\u76f8\u8680\u523b<\/strong> SiO\u2082 \u7684\u5178\u578b\u901f\u7387\u5728 4 \u2013 10 \u03bcm\/\u5c0f\u65f6<\/strong> \u4e4b\u95f4\u3002<\/p>\n VPE\u7cfb\u7edf\u7531\u53cd\u5e94\u5ba4\u548c\u6676\u5706\u5939\u5177\u7ec4\u6210\u3002\u52a0\u70ed\u5143\u4ef6\u96c6\u6210\u5728\u6676\u5706\u5939\u5177\u4e2d\uff0c\u7528\u4e8e\u63a7\u5236\u5f85\u8680\u523b\u57fa\u677f\u7684\u6e29\u5ea6\u3002\u6676\u5706\u5939\u6301\u6709\u4e24\u79cd\u65b9\u5f0f\uff1a\u673a\u68b0\u5939\u6301\u6216\u9759\u7535\u5939\u6301\u3002\u5728\u8fd9\u4e24\u79cd\u65b9\u5f0f\u4e2d\uff0c\u57fa\u677f\u7684\u9690\u85cf\u9762\u90fd\u80fd\u5f97\u5230\u4fdd\u62a4\uff0c\u907f\u514d\u88ab\u8680\u523b\u3002<\/p>\n 4.1. \u591a\u82af\u7247\u9759\u7535\u5939\u5177<\/a> 4.2. \u6676\u5706\u5939\u5177\u5b89\u5168\u7f51<\/a>\u548c\u9002\u914d\u73af 4.3. \u53cd\u5e94\u5ba4\u6e29\u63a7 <\/p>\n idonus \u6c22\u6c1f\u9178\uff08HF\uff09\u84b8\u6c7d\u76f8\u8680\u523b\uff08VPE\uff09\u7cfb\u7edf\u662f\u4e00\u79cd\u6d01\u51c0\u5ba4\u5fae\u52a0\u5de5\u8bbe\u5907\u3002HF\u84b8\u6c7d\u901a\u8fc7\u70ed\u63a7\u8680\u523b\u4e8c\u6c27\u5316\u7845\u5c42\uff0c\u5b9e\u73b0\u65e0\u7c98\u9644\u91ca\u653e\u5fae\u673a\u7535\u7cfb\u7edf\uff08MEMS\uff09\u3002 idonus \u63d0\u4f9b\u591a\u79cd\u6c22\u6c1f\u9178\uff08H <\/p>\n","protected":false},"author":7,"featured_media":576,"comment_status":"open","ping_status":"open","sticky":false,"template":"","format":"standard","meta":{"_vp_format_video_url":"","_vp_image_focal_point":[]},"categories":[163],"tags":[7,8,240,241,166,239],"yoast_head":"\n1. \u4ea7\u54c1\u6982\u8ff0<\/strong><\/h3>\n
\n
2. \u84b8\u6c7d\u76f8 HF \u7684\u5e94\u7528<\/strong><\/h3>\n
3. \u4ea7\u54c1\u63cf\u8ff0<\/strong><\/h3>\n
\n
\n\u4e00\u65e6\u57fa\u677f\u88ab\u5939\u6301\u5728\u6676\u5706\u5939\u5177\u4e0a\uff0c\u53cd\u5e94\u5ba4\u53ef\u4ee5\u5145\u6ee1\u6db2\u6001HF\u3002\u7136\u540e\uff0c\u7528\u6676\u5706\u5939\u5177\u5c01\u95ed\u53cd\u5e94\u5ba4\u3002HF\u5728\u5ba4\u6e29\u4e0b\u84b8\u53d1\uff0c\u8680\u523b\u8fc7\u7a0b\u81ea\u52a8\u5f00\u59cb\u3002\u8680\u523b\u901f\u7387\u901a\u8fc7\u8c03\u6574\u6676\u5706\u7684\u6e29\u5ea6\u6765\u63a7\u5236\uff0c\u6e29\u5ea6\u53ef\u8c03\u8303\u56f4\u4e3a35\u00b0C\u81f360\u00b0C\u3002
\nHF\u9178\u53ef\u4ee5\u7528\u4e8e\u591a\u6b21\u8680\u523b\u3002\u4e3a\u6b64\uff0cHF\u50a8\u6db2\u69fd\u7528\u4e8e\u6682\u65f6\u50a8\u5b58HF\u6db2\u4f53\uff0c\u4f9b\u57fa\u677f\u4ea4\u6362\u65f6\u4f7f\u7528\uff1a\u5728\u5904\u7406\u5b8c\u4e00\u4e2a\u6676\u5706\u540e\uff0c\u53cd\u5e94\u5ba4\u4e2d\u7684\u9178\u6db2\u53ef\u4ee5\u6d41\u5165\u53ef\u5bc6\u5c01\u7684HF\u50a8\u6db2\u69fd\u3002HF\u6db2\u4f53\u8f6c\u79fb\u901a\u8fc7\u964d\u4f4eHF\u50a8\u6db2\u69fd\u7684\u624b\u67c4\u6765\u7b80\u5355\u5b8c\u6210\u3002\u901a\u8fc7\u8fde\u901a\u5bb9\u5668\uff0c\u9178\u6db2\u6d41\u5165HF\u50a8\u6db2\u69fd\uff0c\u5e76\u53ef\u4ee5\u901a\u8fc7\u624b\u52a8\u9600\u95e8\u5173\u95ed\u3002\u91cd\u65b0\u586b\u5145\u53cd\u5e94\u5ba4\u65f6\uff0c\u53ea\u9700\u8f6c\u52a8\u9600\u95e8\u5e76\u63d0\u5347\u624b\u67c4\uff0c\u9178\u6db2\u5373\u53ef\u6d41\u56de\u53cd\u5e94\u5ba4\u3002
\nVPE\u7cfb\u7edf\u5360\u5730\u9762\u79ef\u5c0f\uff0c\u53ef\u4ee5\u8f7b\u677e\u96c6\u6210\u5230\u73b0\u6709\u7684\u6d41\u7bb1\u4e2d\u3002<\/li>\n<\/ul>\n4\u3001\u53ef\u9009\u914d\u7f6e<\/strong><\/h3>\n
\n\u9759\u7535\u5939\u5177<\/a>\u80fd\u591f\u901a\u8fc7\u9759\u7535\u529b\u5c06\u591a\u4e2a\u82af\u7247\u6216\u6676\u5706\u7684\u90e8\u5206\u5939\u6301\u5728\u6676\u5706\u5939\u5177\u4e0a\u3002\u8be5\u8bbe\u5907\u5728\u7814\u53d1\u539f\u578b\u5236\u4f5c\u4e2d\u975e\u5e38\u6709\u7528\uff0c\u56e0\u4e3a\u5728\u67d0\u4e9b\u60c5\u51b5\u4e0b\u65e0\u6cd5\u5904\u7406\u5b8c\u6574\u7684\u6676\u5706\u3002\u82af\u7247\u7684\u9759\u7535\u5939\u6301\u4f7f\u5f97\u53ef\u4ee5\u5728HF\u84b8\u6c14\u91ca\u653e\u4e4b\u524d\u5bf9MEMS\u6676\u5706\u8fdb\u884c\u4e25\u82db\u7684\u5207\u5272\u8fc7\u7a0b\u3002\u901a\u8fc7\u4fee\u6539\u4f20\u7edf\u7684\u5236\u9020\u6d41\u7a0b\uff0c\u53ef\u4ee5\u751f\u4ea7\u51fa\u5177\u6709\u6781\u8f6f\u60ac\u6302\u7ed3\u6784\u7684MEMS\u8bbe\u5907\u3002
\n\u4f7f\u7528\u9759\u7535\u5939\u5177\u975e\u5e38\u7b80\u5355\u3002\u5c06\u82af\u7247\u653e\u7f6e\u5728\u6676\u5706\u5939\u5177\u4e0a\uff0c\u7136\u540e\u901a\u8fc7\u63a7\u5236\u5355\u5143\u4e0a\u7684\u5f00\u5173\u6253\u5f00\u9759\u7535\u529b\u3002\u9759\u7535\u529b\u53ef\u4ee5\u8c03\u8282\u3002<\/p>\n
\n\u5b89\u5168\u7f51\u662f\u6297HF\u7684\u7f51\u72b6\u7269\uff0c\u653e\u7f6e\u5728\u53cd\u5e94\u5ba4\u5185\uff08\u89c1\u56fe6\uff09\u3002\u5176\u76ee\u7684\u662f\u6355\u6349\u672a\u9644\u7740\u5728\u6676\u5706\u4e0a\u7684\u91ca\u653e\u90e8\u4ef6\u3002HF\u4f1a\u5728\u7f51\u72b6\u7269\u4e0a\u51dd\u7ed3\u3002\u56e0\u6b64\uff0c\u64cd\u4f5c\u65f6\u5fc5\u987b\u6234\u4e0a\u9632\u62a4\u624b\u5957\u3002150mm\u548c200mm\u6676\u5706\u5939\u5177\u7684\u9002\u914d\u73af\u53ef\u4ee5\u7528\u4e8e\u9002\u914d\u66f4\u5c0f\u7684\u6676\u5706\u5c3a\u5bf8\u3002<\/p>\n
\n\u4e8c\u6c27\u5316\u7845\u7684\u8680\u523b\u901f\u7387\u968f\u7740\u53cd\u5e94\u5ba4\u4e2d\u6db2\u6001HF\u7684\u6e29\u5ea6\u53d8\u5316\u800c\u53d8\u5316\u3002HF\u7684\u6e29\u5ea6\u53d6\u51b3\u4e8e\u6d01\u51c0\u5ba4\u7684\u73af\u5883\u6e29\u5ea6\u3002\u6b64\u5916\uff0c\u957f\u65f6\u95f4\u7684\u8680\u523b\u8fc7\u7a0b\u4e2dHF\u4f1a\u52a0\u70ed\uff08\u653e\u70ed\u53cd\u5e94\uff09\uff0c\u5bfc\u81f4\u8680\u523b\u901f\u7387\u4ece\u6676\u5706\u5230\u6676\u5706\u9010\u6e10\u589e\u5927\uff0c\u76f4\u5230\u7cfb\u7edf\u7a33\u5b9a\u4e3a\u6b62\u3002<\/p>\n5\u3001\u5e94\u7528<\/strong><\/h3>\n
\n\n
\n \n \n \n \n \n \n \n \n