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\u5e72\u6d89\u4eea\u53ef\u4f5c\u4e3a\u88ab\u52a8\u4f4d\u7f6e\u8bfb\u6570\u8bbe\u5907\uff0c\u4e5f\u53ef\u4f5c\u4e3a\u4f3a\u670d\u56de\u8def\u4e2d\u7684\u4e3b\u52a8\u53cd\u9988\u7ec4\u4ef6\u3002\u4e0e\u7ebf\u6027\u7f16\u7801\u5668\u4e0d\u540c\uff0c\u5e72\u6d89\u4eea\u7684\u5149\u675f\u8def\u5f84\u53ef\u76f4\u63a5\u4e0e\u88ab\u6d4b\u5bf9\u8c61\u5bf9\u51c6\uff0c\u4ece\u800c\u6d88\u9664\u6216\u6781\u5927\u51cf\u5c11 Abb\u00e9 \u8bef\u5dee\u3002<\/p>\n
\u4e86\u89e3\u6211\u4eec\u521b\u65b0\u7684\u8fd0\u52a8\u63a7\u5236\u7cfb\u7edf<\/h3>\nDover Motion \u6b63\u5728\u7528 SmartStage XY \u548c DOF-5<\/a> \u4ea7\u54c1\u98a0\u8986\u4f20\u7edf\u8fd0\u52a8\u63a7\u5236\uff0c\u5b83\u4eec\u5185\u7f6e\u4e86\u8fd0\u52a8\u63a7\u5236\u5668\u548c\u9a71\u52a8\u5668\uff0c\u5b9e\u73b0\u6700\u591a\u4e09\u8f74\u8fd0\u52a8\u7684\u4e00\u6839\u7535\u7f06\u8fde\u63a5\u3002<\/p>\n
\n
\n
SmartStage XY \u53ef\u76f4\u63a5\u8fde\u63a5\u81f3 PC<\/strong><\/p>\n<\/li>\n
\n
\u5185\u7f6e\u8fd0\u52a8\u63a7\u5236\u5668\u6280\u672f\u7684\u7ebf\u6027\u5e73\u53f0<\/strong><\/p>\n<\/li>\n
\n
SmartStage XY vs. \u4f20\u7edfXY\u5bf9\u6bd4\u56fe<\/strong><\/p>\n<\/li>\n<\/ul>\n
Dover Motion \u7684\u4e00\u4f53\u5f0f SmartStage \u63a7\u5236\u5668\u4f18\u52bf\uff1a<\/h4>\n\n
\n
\u4ece4\u6839\u7535\u7f06\u51cf\u5c11\u52301\u6839\uff0c\u6781\u5927\u7b80\u5316\u5e03\u7ebf<\/p>\n<\/li>\n
\n
\u53ea\u9700\u63d0\u4f9b\u7535\u6e90\u548c\u901a\u8baf<\/p>\n<\/li>\n
\n
\u9ad8\u7cbe\u5ea6\u53cd\u9988\uff0c\u5206\u8fa8\u7387\u9ad8\u8fbe 5nm<\/p>\n<\/li>\n
\n
XY\u5e73\u53f0\u4f53\u79ef\u6700\u591a\u51cf\u5c11400%\uff0c\u8282\u7701\u4eea\u5668\u7a7a\u95f4<\/p>\n<\/li>\n
\n
\u517c\u5bb9 Motion Synergy™ API\uff0c\u4e00\u4f53\u5f0f\u8f6f\u4ef6\u4e0e\u7528\u6237\u754c\u9762\u89e3\u51b3\u65b9\u6848<\/p>\n<\/li>\n<\/ul>\n
SmartStage \u548c DOF-5 \u9ad8\u7ea7\u8fd0\u52a8\u63a7\u5236\u529f\u80fd<\/h3>\n
\n
\n
\u8f7b\u677e\u8fde\u63a5 DOF-5 \u81f3\u81ea\u52a8\u5bf9\u7126\u4f20\u611f\u5668<\/strong>\uff0c\u901a\u8fc7\u65e0\u566a\u58f0\u6570\u5b57\u4fe1\u53f7\u9a71\u52a8\uff08\u652f\u6301Step-Direction\u548cA-quad-B\u683c\u5f0f\uff09\uff0c\u5b9e\u73b0\u8fde\u7eed\u8ffd\u8e2a\u805a\u7126<\/p>\n<\/li>\n
\n
SmartStage XY \u5185\u7f6e\u7684 Trigger On Position\uff08TOP\uff09\u529f\u80fd<\/strong>\uff0c\u53ef\u5b9e\u73b0\u76f8\u673a\u3001\u6fc0\u5149\u5668\u6216\u5176\u4ed6\u5916\u90e8\u8bbe\u5907\u7684\u7cbe\u786e\u540c\u6b65\u89e6\u53d1\uff0c\u5c24\u5176\u9002\u7528\u4e8e TDI \u626b\u63cf\u663e\u5fae\u6210\u50cf<\/p>\n<\/li>\n
\n
\u652f\u6301\u5404\u8f74\u540c\u6b65\u8fd0\u52a8<\/strong><\/p>\n<\/li>\n
\n
\u5e73\u53f0\u7cbe\u5ea6\u8865\u507f (SAC)<\/strong> \u63d0\u4f9b\u5728\u7528\u6237\u5173\u6ce8\u70b9\u7684\u9ad8\u7cbe\u5ea6\u5b9a\u4f4d\uff0c\u6d88\u9664 Abb\u00e9 \u8bef\u5dee\u7b49\u8f68\u8ff9\u8bef\u5dee<\/p>\n<\/li>\n
\n
\u91cd\u590d\u8fd0\u52a8\u589e\u5f3a (RME)<\/strong> \u7b97\u6cd5\u63d0\u5347\u542f\u505c\u6027\u80fd\uff0c\u5927\u5e45\u63d0\u5347\u901a\u91cf<\/p>\n<\/li>\n<\/ul>\n
$\"\"$ <\/p>\n
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DOVER MOTION<\/a>\n \u4f4d\u7f6e\u53cd\u9988\u88c5\u7f6e<\/a>\n \u7535\u673a<\/a>\n \u8fd0\u52a8\u63a7\u5236\u5668<\/a>\n \u8fd0\u52a8\u63a7\u5236\u7cfb\u7edf<\/a>\n \u9a71\u52a8\u5668<\/a><\/div>","protected":false},"excerpt":{"rendered":"
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