ASI LS\u7cfb\u5217\u7535\u63a7\u7ebf\u6027\u4f4d\u79fb\u5e73\u53f0\u5177\u6709\u5185\u7f6e\u9650\u4f4d\u5f00\u5173\uff0c\u53ef\u4ee5\u914d\u7f6e\u4e0b\u8868\u4e2d\u5217\u51fa\u7684\u8bb8\u591a\u5bfc\u87ba\u6746\u9009\u9879\u3002\u5728\u6807\u51c6\u65cb\u8f6c\u7f16\u7801\u5668\u914d\u7f6e\u4e2d\uff0c\u4f7f\u7528ASI\u7684MS-2000\u63a7\u5236\u7535\u5b50\u8bbe\u5907\uff0c\u53ef\u4ee5\u8f7b\u677e\u83b7\u5f9750-100nm\u8303\u56f4\u5185\u7684\u5206\u8fa8\u7387\u3002\u8fd8\u53ef\u83b7\u5f97\u5c0f\u4e8e300nm RMS\u7684\u91cd\u590d\u6027\u56e0\u7d20\u3002<\/p>\n
\u53ef\u9009\u7684\u7ebf\u6027\u7f16\u7801\u5668\u63d0\u4f9b10 nm\u7684\u6807\u5c3a\u5206\u8fa8\u7387\uff0c\u6bcf\u4e2a\u6807\u5c3a\u957f\u5ea6\u7684\u6807\u5c3a\u7cbe\u5ea6\u4e3a\u00b13\u03bcm\u3002<\/p>\n<\/div>\n<\/div>\n
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\u7f8e\u56fdASI LS-Series \u7535\u63a7\u7ebf\u6027\u4f4d\u79fb\u5e73\u53f0\u89c4\u683c\uff1a<\/strong><\/p>\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\n\nSpecifications<\/td>\n | LS-25<\/td>\n | LS-50<\/td>\n | LS-100<\/td>\n | LS-200<\/td>\n | LS-400<\/td>\n<\/tr>\n |
Encoder resolution*<\/td>\n | 5.0 nm<\/td>\n | 5.5 nm<\/td>\n | 5.5 nm<\/td>\n | 5.5 nm<\/td>\n | 5.5 nm (.0055 \u00b5m\u2020<\/sup>)<\/td>\n<\/tr>\n |
With linear encoder<\/td>\n | 10 nm<\/td>\n | 10 nm<\/td>\n | 10 nm<\/td>\n | 10 nm<\/td>\n | 10 nm<\/td>\n<\/tr>\n |
RMS repeatability (typical)*<\/td>\n | < 0.7 \u03bcm<\/td>\n | < 0.7 \u03bcm<\/td>\n | < 0.7 \u03bcm<\/td>\n | < 0.7 \u03bcm<\/td>\n | < 0.7 \u03bcm (< 8.0 \u03bcm\u2020<\/sup>)<\/td>\n<\/tr>\n |
With linear encoder (typical)<\/td>\n | 200 nm<\/td>\n | 200 nm<\/td>\n | 200 nm<\/td>\n | 200 nm<\/td>\n | 200 nm<\/td>\n<\/tr>\n |
Lead screw accuracy<\/td>\n | 0.25 \u03bcm\/mm<\/td>\n | 0.25 \u03bcm\/mm<\/td>\n | 0.25 \u03bcm\/mm<\/td>\n | 0.25 \u03bcm\/mm<\/td>\n | 0.25 \u03bcm\/mm<\/td>\n<\/tr>\n |
With linear encoder<\/td>\n | \u00b1 3 \u03bcm\/length scale<\/td>\n | \u00b1 3 \u03bcm\/length scale<\/td>\n | \u00b1 3 \u03bcm\/length scale<\/td>\n | \u00b1 3 \u03bcm\/length scale<\/td>\n | \u00b1 3 \u03bcm\/length scale<\/td>\n<\/tr>\n |
Maximum velocity*<\/td>\n | 1.60 mm\/s<\/td>\n | 1.75 mm\/s<\/td>\n | 1.75 mm\/s<\/td>\n | 1.75 mm\/s<\/td>\n | 1.75 mm\/s<\/td>\n<\/tr>\n |
Range of travel<\/td>\n | 25 mm (1\u201d)<\/td>\n | 50 mm (2\u201d)<\/td>\n | 100 mm (4\u201d)<\/td>\n | 200 mm (8\u201d)<\/td>\n | 400 mm (16\u201d)<\/td>\n<\/tr>\n |
Length<\/td>\n | 86 mm (3.4\u201d)<\/td>\n | 152.5 mm (6\u201d)<\/td>\n | 203.5 mm (8\u201d)<\/td>\n | 305 mm (12\u201d)<\/td>\n | 594.5 mm (23.4\u201d)<\/td>\n<\/tr>\n |
With connector**<\/td>\n | 137 mm (5.4\u201d)<\/td>\n | 233 mm (9.2\u201d)<\/td>\n | 286 mm (11.3\u201d)<\/td>\n | 369 mm (14.5\u201d)<\/td>\n | 675 mm (26.6\u201d)<\/td>\n<\/tr>\n |
With RA connector**<\/td>\n | \u2014\u2013<\/td>\n | 195 mm (7.6\u201d)<\/td>\n | 247 mm (9.7\u201d)<\/td>\n | 380 mm (15\u201d)<\/td>\n | 363 mm (25\u201d)<\/td>\n<\/tr>\n |
Width<\/td>\n | 68.5 mm (2.7\u201d)<\/td>\n | 68.5 mm (2.7\u201d)<\/td>\n | 68.5 mm (2.7\u201d)<\/td>\n | 68.5 mm (2.7\u201d)<\/td>\n | 150 mm (5.9\u201d)<\/td>\n<\/tr>\n |
With connector**<\/td>\n | 120 mm (4.7\u201d)<\/td>\n | 132.5 mm (5.2\u201d)<\/td>\n | 132.5 mm (5.2\u201d)<\/td>\n | 132.5 mm (5.2\u201d)<\/td>\n | 215 mm (8.5\u201d)<\/td>\n<\/tr>\n |
With RA connector**<\/td>\n | \u2014\u2013<\/td>\n | 93.5 mm (3.7\u201d)<\/td>\n | 93.5 mm (3.7\u201d)<\/td>\n | 93.5 mm (3.7\u201d)<\/td>\n | 175 mm (6.9\u201d)<\/td>\n<\/tr>\n |
Height<\/td>\n | 35.5 mm (1.4\u201d)<\/td>\n | 30 mm (1.2\u201d)<\/td>\n | 30 mm (1.2\u201d)<\/td>\n | 30 mm (1.2\u201d)<\/td>\n | 50 mm (2\u201d)<\/td>\n<\/tr>\n |
Weight<\/td>\n | 0.5 kg (1 lb)<\/td>\n | 1.4 kg (3 lb)<\/td>\n | 1.9 kg (4 lb)<\/td>\n | 2.4 kg (6 lb)<\/td>\n | 9 kg (20 lb)<\/td>\n<\/tr>\n<\/tbody>\n<\/table>\n <\/p>\n |